MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX53/D
50 kPa Uncompensated
Silicon Pressure Sensors
The MPX53/MPXV53GC series silicon piezoresistive pressure sensors provide a very
accurate and linear voltage output — directly proportional to the applied pressure. These
standard, low cost, uncompensated sensors permit manufacturers to design and add
their own external temperature compensating and signal conditioning networks.
Compensation techniques are simplified because of the predictability of Motorola’s single
element strain gauge design.
Features
•
Low Cost
•
Patented Silicon Shear Stress Strain Gauge Design
•
Ratiometric to Supply Voltage
•
Easy to Use Chip Carrier Package Options
•
60 mV Span (Typ)
•
Differential and Gauge Options
Application Examples
•
Air Movement Control
•
Environmental Control Systems
•
Level Indicators
•
Leak Detection
•
Medical Instrumentation
•
Industrial Controls
•
Pneumatic Control Systems
•
Robotics
Figure 1 shows a schematic of the internal circuitry
on the stand–alone pressure sensor chip.
+ V
S
+ V
out
1
- V
out
GND
2
3
4
MPXV53GC7U
CASE 482C
NOTE: Pin 1 is the notched pin.
Sensor
MPXV53GC6U
CASE 482A
SMALL OUTLINE
PACKAGE
MPX53
MPXV53GC
SERIES
0 to 50 kPa (0–7.25 psi)
60 mV FULL SCALE SPAN
(TYPICAL)
UNIBODY PACKAGE
MPX53D
CASE 344
MPX53GP
CASE 344B
PIN NUMBER
Gnd
+V
out
V
S
–V
out
5
6
7
8
N/C
N/C
N/C
N/C
Figure 1. Uncompensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Replaces MPX50/D
MPX53DP
CASE 344C
NOTE: Pin 1 is the notched pin.
PIN NUMBER
1
2
Gnd
+V
out
3
4
V
S
–V
out
REV 2
Motorola Sensor Device Data
©
Motorola, Inc. 2002
1
MPX53 MPXV53GC SERIES
MAXIMUM RATINGS
(NOTE)
Rating
Maximum Pressure (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
P
max
T
stg
T
A
Value
200
–40 to +125
–40 to +125
Unit
kPa
°C
°C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS
(V
S
= 3.0 Vdc, T
A
= 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range
(1)
Supply Voltage
(2)
Supply Current
Full Scale Span
(3)
Offset
(4)
Sensitivity
Linearity
(5)
Pressure Hysteresis
(5)
(0 to 50 kPa)
Temperature Hysteresis
(5)
(– 40°C to +125°C)
Temperature Coefficient of Full Scale Span
(5)
Temperature Coefficient of Offset
(5)
Temperature Coefficient of Resistance
(5)
Input Impedance
Output Impedance
Response Time
(6)
(10% to 90%)
Warm–Up
Offset Stability
(7)
Symbol
P
OP
V
S
I
o
V
FSS
V
off
∆V/∆P
—
—
—
TCV
FSS
TCV
off
TCR
Z
in
Z
out
t
R
—
—
Min
0
—
—
45
0
—
–0.6
—
—
–0.22
—
0.31
355
750
—
—
—
Typ
—
3.0
6.0
60
20
1.2
—
±
0.1
±
0.5
—
±
15
—
—
—
1.0
20
±
0.5
Max
50
6.0
—
90
35
—
0.4
—
—
–0.16
—
0.37
505
1875
—
—
—
Unit
kPa
Vdc
mAdc
mV
mV
mV/kPa
%V
FSS
%V
FSS
%V
FSS
%V
FSS
/°C
µV/°C
%Z
in
/°C
Ω
Ω
ms
ms
%V
FSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
•
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
•
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
•
TCR:
Z
in
deviation with minimum rated pressure applied, over the temperature range of –40°C to +125°C,
relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
MPX53 MPXV53GC SERIES
TEMPERATURE COMPENSATION
Figure 2 shows the typical output characteristics of the
MPX53/MPXV53GC series over temperature.
The piezoresistive pressure sensor element is a semicon-
ductor device which gives an electrical output signal propor-
tional to the pressure applied to the device. This device uses
a unique transverse voltage diffused semiconductor strain
gauge which is sensitive to stresses produced in a thin sili-
con diaphragm by the applied pressure.
Because this strain gauge is an integral part of the silicon
diaphragm, there are no temperature effects due to differ-
ences in the thermal expansion of the strain gauge and the
diaphragm, as are often encountered in bonded strain gauge
pressure sensors. However, the properties of the strain
gauge itself are temperature dependent, requiring that the
device be temperature compensated if it is to be used over
an extensive temperature range.
Temperature compensation and offset calibration can be
achieved rather simply with additional resistive components,
or by designing your system using the MPX2053 series
sensors.
Several approaches to external temperature compensa-
tion over both –40 to +125°C and 0 to +80°C ranges are
presented in Motorola Applications Note AN840.
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: V
out
= V
off
+ sensitivity x P over the operating
pressure range (see Figure 3). There are two basic methods
for calculating nonlinearity: (1) end point straight line fit or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motoro-
la’s specified pressure sensor linearities are based on the
end point straight line method measured at the midrange
pressure.
70
100
90
80
70
OUTPUT (mVdc)
60
50
40
30
20
1
2
3
20
4
5
6
7
OFFSET
(TYP)
10
30
40
50
8
MPX53
V
S
= 3 Vdc
P1 > P2
+25°C
-40°C
OUTPUT (mVdc)
60
50
40
30
20
10
0
0
PRESSURE (kPA)
THEORETICAL
OFFSET
(V
OFF
)
MAX
P
OP
ACTUAL
SPAN
(V
FSS
)
LINEARITY
+125°C
SPAN
RANGE
(TYP)
10
0
PSI 0
kPa 0
PRESSURE DIFFERENTIAL
Figure 2. Output versus Pressure Differential
SILICONE
DIE COAT
WIRE BOND
Figure 3. Linearity Specification Comparison
DIE
LEAD FRAME
Figure 4. Cross–Sectional Diagram (not to scale)
Figure 4 illustrates the differential or gauge configuration
in the unibody chip carrier (Case 344). A silicone gel isolates
the die surface and wire bonds from the environment, while
allowing the pressure signal to be transmitted to the silicon
diaphragm.
The MPX53/MPXV53GC series pressure sensor operating
characteristics and internal reliability and qualification tests
are based on use of dry air as the pressure media. Media
other than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
Motorola Sensor Device Data
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
P2
P1
STAINLESS STEEL
METAL COVER
EPOXY
CASE
RTV DIE
BOND
3
MPX53 MPXV53GC SERIES
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing silicone gel which
isolates the die from the environment. The Motorola pres-
Part Number
MPX53D
MPX53DP
MPX53GP
MPXV53GC series
Case Type
344
344C
344B
482A, 482C
sure sensor is designed to operate with positive differential
pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the
table below:
Pressure (P1) Side Identifier
Stainless Steel Cap
Side with Port Marking
Side with Port Attached
Sides with Port Attached
ORDERING INFORMATION – UNIBODY PACKAGE
MPX53 series pressure sensors are available in differential and gauge configurations. Devices are available with basic
element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure
connections.
MPX Series
Device Type
Basic Element
Ported Elements
Options
Differential
Differential
Gauge
Case Type
Case 344
Case 344C
Case 344B
Order Number
MPX53D
MPX53DP
MPX53GP
Device Marking
MPX53D
MPX53DP
MPX53GP
ORDERING INFORMATION — SMALL OUTLINE PACKAGE
The MPXV53GC series pressure sensors are available with a pressure port, surface mount or DIP leadforms, and two packing
options.
Device Order No.
MPXV53GC6T1
MPXV53GC6U
MPXV53GC7U
Case No.
482A
482A
482C
Packing Options
Tape & Rail
Rails
Rails
Marking
MPXV53G
MPXV53G
MPXV53G
4
Motorola Sensor Device Data
MPX53 MPXV53GC SERIES
PACKAGE DIMENSIONS
C
R
M
1
B
–A–
N
PIN 1
1
2
3
4
2
3
4
Z
NOTES:
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION -A- IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
INCHES
MIN
MAX
0.595
0.630
0.514
0.534
0.200
0.220
0.016
0.020
0.048
0.064
0.100 BSC
0.014
0.016
0.695
0.725
30
_
NOM
0.475
0.495
0.430
0.450
0.048
0.052
0.106
0.118
MILLIMETERS
MIN
MAX
15.11
16.00
13.06
13.56
5.08
5.59
0.41
0.51
1.22
1.63
2.54 BSC
0.36
0.40
17.65
18.42
30
_
NOM
12.07
12.57
10.92
11.43
1.22
1.32
2.68
3.00
L
–T–
J
SEATING
PLANE
G
F
4 PL
F
Y
D
0.136 (0.005)
M
T A
M
DAMBAR TRIM ZONE:
THIS IS INCLUDED
WITHIN DIM. “F” 8 PL
DIM
A
B
C
D
F
G
J
L
M
N
R
Y
Z
STYLE 1:
PIN 1.
2.
3.
4.
GROUND
+ OUTPUT
+ SUPPLY
- OUTPUT
STYLE 2:
PIN 1.
2.
3.
4.
V
CC
- SUPPLY
+ SUPPLY
GROUND
STYLE 3:
PIN 1.
2.
3.
4.
GND
-VOUT
VS
+VOUT
CASE 344–15
ISSUE Z
SEATING
PLANE
–T–
R
H
N
PORT #1
POSITIVE
PRESSURE
(P1)
–A–
U
L
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.305
0.325
0.016
0.020
0.048
0.064
0.100 BSC
0.182
0.194
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.159
0.230
0.250
0.220
0.240
0.910 BSC
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
7.75
8.26
0.41
0.51
1.22
1.63
2.54 BSC
4.62
4.93
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
5.84
6.35
5.59
6.10
23.11 BSC
–Q–
B
PIN 1
1 2
3 4
K
S
F
G
D
4 PL
0.13 (0.005)
–P–
0.25 (0.010)
J
C
M
T Q
S
M
T S
S
Q
S
STYLE 1:
PIN 1.
2.
3.
4.
GROUND
+ OUTPUT
+ SUPPLY
- OUTPUT
CASE 344B–01
ISSUE B
Motorola Sensor Device Data
5
